ECE 1251 - MICRO AND NANO DEVICE FABRICATION LABORATORY

Minimum Credits: 3
Maximum Credits: 3
Micro/Nano fabrication area in science and engineering has already produced remarkable results in understanding and controlling matter and is expected to make a tremendous impact on electronics and society by facilitating breakthroughs for tomorrow's electronic devices. Micro and Nano Device Laboratory will introduce students to device fabrication and design methodology for fundamental fabrication processes. In addition, this course will provide an understanding of the scientific and technical aspects of microtechnology/nanotechnology and will enable students to contribute to this rapidly developing new technology field. This course comprises laboratory work and accompanying lectures that cover cleanroom introduction, wafer cleaning, silicon oxidation, mask design, photolithography, thin film deposition, wet and dry etching, and other nanofabrication processes. This elective course is designed for junior and senior level undergraduate students.
Academic Career: Undergraduate
Course Component: Lecture
Grade Component: Letter Grade
Course Requirements: PREQ: (CHEM 0970 or CHEM 0420) and PHYS 0175 and (ENGR 0240 or ECE 1250) or instructor approval. PROGRAM: Swanson School of Engineering

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